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Surface chemical analysis - Sputter depth profiling - Optimization using layered systems as reference materials
Pages: 24
Publication date: 2015-12-01
Surface chemical analysis - Depth profiling - Method for sputter rate determination in X-ray photoelectron spectroscopy, Auger electron spectroscopy and secondary-ion mass spectrometry sputter depth profiling using single and multi-layer thin films
Publication date: 2015-08-01
Surface chemical analysis - Depth profiling - Methods for ion beam alignment and the associated measurement of current or current density for depth profiling in AES and XPS
Pages:
Publication date: 2013-06-01